Chemical Properties of Hexamethyldisilazane (CAS 999-97-3)

InChI

InChI=1S/C6H19NSi2/c1-8(2,3)7-9(4,5)6/h7H,1-6H3

InChI Key

FFUAGWLWBBFQJT-UHFFFAOYSA-N

Formula

C6H19NSi2

SMILES

C[Si](C)(C)N[Si](C)(C)C

Molecular Weight¹

161.39

CAS

999-97-3

Other Names

• ((CH3)3Si)2NH
• 1,1,1,3,3,3-hexamethyldisilazane
• 1,1,1-Trimethyl-N-(trimethylsilyl)silanamine
• HMDS
• HMDS (silazane)
• NSC 93895
• OAP
• SZ 6079
• Silanamine, 1,1,1-trimethyl-N-(trimethylsilyl)-
• TSL 8802
• Trimethyl-N-(trimethylsilyl)silanamine
• bis(trimethylsilyl)amine
• di(trimethylsilyl)amine
• disilazane, 1,1,1,3,3,3-hexamethyl-
• hexamethyldisilylamine

• Δ_vapH° : Enthalpy of vaporization at standard conditions (kJ/mol).
• Δ_vapH : Enthalpy of vaporization at a given temperature (kJ/mol).
• IE : Ionization energy (eV).
• log₁₀WS : Log10 of Water solubility in mol/l.
• logP_oct/wat : Octanol/Water partition coefficient.
• P_vap : Vapor pressure (kPa).
• I_np : Non-polar retention indices.
• T_boil : Normal Boiling Point Temperature (K).
• T_boil : Boiling point at given pressure (K).
• ¹: Molecular weight from the IUPAC atomic weights tables.

Physical Properties

Property	Value	Unit	Source
ΔvapH°	42.20 ± 0.90	kJ/mol	NIST
IE	[8.55; 8.79]	eV
IE	8.55	eV	NIST
IE	8.79 ± 0.05	eV	NIST
IE	8.66	eV	NIST
log10WS	2.37		Crippen Calculated Property
logPoct/wat	2.246		Crippen Calculated Property
Inp	[686.00; 717.00]
Inp	686.00		NIST
Inp	717.00		NIST
Inp	686.00		NIST
Tboil	[397.20; 399.00]	K
Tboil	399.00	K	NIST
Tboil	399.00	K	NIST
Tboil	397.20 ± 0.60	K	NIST

Temperature Dependent Properties

Property	Value	Unit	Temperature (K)	Source
ΔvapH	36.00	kJ/mol	344.50	NIST
Pvap	[1.51; 59.76]	kPa	[290.80; 382.20]
Pvap	1.51	kPa	290.80	Synthes...
Pvap	1.54	kPa	290.90	Synthes...
Pvap	1.68	kPa	292.00	Synthes...
Pvap	1.73	kPa	293.50	Synthes...
Pvap	2.71	kPa	301.10	Synthes...
Pvap	2.68	kPa	301.50	Synthes...
Pvap	4.25	kPa	311.40	Synthes...
Pvap	4.36	kPa	312.40	Synthes...
Pvap	5.93	kPa	320.20	Synthes...
Pvap	6.60	kPa	321.20	Synthes...
Pvap	9.72	kPa	329.70	Synthes...
Pvap	10.21	kPa	330.90	Synthes...
Pvap	10.30	kPa	331.80	Synthes...
Pvap	14.79	kPa	340.10	Synthes...
Pvap	15.35	kPa	341.10	Synthes...
Pvap	20.68	kPa	349.80	Synthes...
Pvap	23.41	kPa	352.70	Synthes...
Pvap	30.30	kPa	360.30	Synthes...
Pvap	31.34	kPa	360.50	Synthes...
Pvap	42.85	kPa	370.00	Synthes...
Pvap	45.32	kPa	371.80	Synthes...
Pvap	59.76	kPa	382.20	Synthes...

Pressure Dependent Properties

Similar Compounds

Find more compounds similar to Hexamethyldisilazane.

Sources

• Crippen Method
• Crippen Method
• Synthesis and characterization of organosilicon compounds as novel precursors for CVD processes
• Low cost apparatus for rapid boiling point determination of small air sensitive samples under inert atmosphere
• NIST Webbook

Note: Cheméo is only indexing the data, follow the source links to retrieve the latest data. The source is also providing more information like the publication year, authors and more. Take the time to validate and double check the source of the data.