Mixture of Silicon tetrachloride + Silane, trichloro

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Silicon tetrachloride

Name
Silicon tetrachloride
InChI
InChI=1S/Cl4Si/c1-5(2,3)4
InChI Key
FDNAPBUWERUEDA-UHFFFAOYSA-N
Formula
Cl4Si
SMILES
Cl[Si](Cl)(Cl)Cl
Mol. Weight (g/mol)
169.90
CAS
10026-04-7

Silane, trichloro

Name
Silane, trichloro
InChI
InChI=1S/Cl3HSi/c1-4(2)3/h4H
InChI Key
ZDHXKXAHOVTTAH-UHFFFAOYSA-N
Formula
Cl3HSi
SMILES
Cl[SiH](Cl)Cl
Mol. Weight (g/mol)
135.45
CAS
10025-78-2
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Datasets

  1. Mole fraction (2)
  2. Pvap - Vapor or sublimation pressure, kPa (2)

Mole fraction of Silane, trichloro (2) [ref]

Fixed Measured
Mole fraction of Silane, trichloro (2) - Liquid Temperature, K - Liquid Mole fraction of Silane, trichloro (2) - Gas
0.2940 343.04 0.4670
0.3780 343.06 0.5540
0.4200 343.07 0.5930
0.6100 343.04 0.7640
0.7130 343.03 0.8320
0.8040 343.06 0.8900
0.8380 343.06 0.9120
0.9270 343.02 0.9620
0.9450 343.02 0.9700
0.9670 343.04 0.9820
0.0160 353.07 0.0330
0.0320 353.06 0.0710
0.0620 353.07 0.1190
0.0990 353.01 0.1790
0.1420 353.05 0.2470
0.2380 353.06 0.3890
0.4490 353.05 0.6300
0.5500 353.04 0.7070
0.6460 353.02 0.7820
0.6890 353.08 0.8090
0.7120 353.02 0.8280
0.7370 353.03 0.8430
0.7970 353.02 0.8790
0.8200 353.00 0.8900
0.8520 353.03 0.9180
0.9550 353.06 0.9730
0.9650 353.03 0.9810
0.1690 363.01 0.2800
0.2430 363.00 0.3820
0.3100 363.00 0.4710
0.4180 363.02 0.5770
0.4570 363.01 0.6170
0.6020 363.02 0.7360
0.6420 363.00 0.7690
0.7170 363.00 0.8210
0.7590 363.00 0.8520
0.7950 363.01 0.8750
0.8350 363.00 0.9070
0.9320 362.99 0.9610

Mole fraction of Silane, trichloro (2) [ref]

Fixed Measured
Mole fraction of Silane, trichloro (2) - Liquid Temperature, K - Liquid Mole fraction of Silane, trichloro (2) - Gas
0.2940 343.04 0.4670
0.3780 343.06 0.5540
0.4200 343.07 0.5930
0.6100 343.04 0.7640
0.7130 343.03 0.8320
0.8040 343.06 0.8900
0.8380 343.06 0.9120
0.9270 343.02 0.9620
0.9450 343.02 0.9700
0.9670 343.04 0.9820
0.0160 353.07 0.0330
0.0320 353.06 0.0710
0.0620 353.07 0.1190
0.0990 353.01 0.1790
0.1420 353.05 0.2470
0.2380 353.06 0.3890
0.4490 353.05 0.6300
0.5500 353.04 0.7070
0.6460 353.02 0.7820
0.6890 353.08 0.8090
0.7120 353.02 0.8280
0.7370 353.03 0.8430
0.7970 353.02 0.8790
0.8200 353.00 0.8900
0.8520 353.03 0.9180
0.9550 353.06 0.9730
0.9650 353.03 0.9810
0.1690 363.01 0.2800
0.2430 363.00 0.3820
0.3100 363.00 0.4710
0.4180 363.02 0.5770
0.4570 363.01 0.6170
0.6020 363.02 0.7360
0.6420 363.00 0.7690
0.7170 363.00 0.8210
0.7590 363.00 0.8520
0.7950 363.01 0.8750
0.8350 363.00 0.9070
0.9320 362.99 0.9610

Vapor or sublimation pressure, kPa [ref]

Fixed Measured
Mole fraction of Silane, trichloro (2) - Liquid Temperature, K - Liquid Vapor or sublimation pressure, kPa - Liquid
0.2940 343.04 203.30
0.3780 343.06 217.30
0.4200 343.07 224.40
0.6100 343.04 257.60
0.7130 343.03 274.00
0.8040 343.06 289.10
0.8380 343.06 294.70
0.9270 343.02 309.80
0.9450 343.02 312.20
0.9670 343.04 316.00
0.0160 353.07 203.00
0.0320 353.06 207.30
0.0620 353.07 214.50
0.0990 353.01 223.70
0.1420 353.05 232.50
0.2380 353.06 254.60
0.4490 353.05 302.60
0.5500 353.04 322.50
0.6460 353.02 342.70
0.6890 353.08 351.00
0.7120 353.02 356.40
0.7370 353.03 362.00
0.7970 353.02 373.60
0.8200 353.00 377.90
0.8520 353.03 385.00
0.9550 353.06 405.00
0.9650 353.03 407.80
0.1690 363.01 308.70
0.2430 363.00 329.00
0.3100 363.00 349.10
0.4180 363.02 376.90
0.4570 363.01 388.00
0.6020 363.02 425.50
0.6420 363.00 435.90
0.7170 363.00 456.30
0.7590 363.00 467.40
0.7950 363.01 477.10
0.8350 363.00 488.00
0.9320 362.99 510.30

Vapor or sublimation pressure, kPa [ref]

Fixed Measured
Mole fraction of Silane, trichloro (2) - Liquid Temperature, K - Liquid Vapor or sublimation pressure, kPa - Liquid
0.2940 343.04 203.30
0.3780 343.06 217.30
0.4200 343.07 224.40
0.6100 343.04 257.60
0.7130 343.03 274.00
0.8040 343.06 289.10
0.8380 343.06 294.70
0.9270 343.02 309.80
0.9450 343.02 312.20
0.9670 343.04 316.00
0.0160 353.07 203.00
0.0320 353.06 207.30
0.0620 353.07 214.50
0.0990 353.01 223.70
0.1420 353.05 232.50
0.2380 353.06 254.60
0.4490 353.05 302.60
0.5500 353.04 322.50
0.6460 353.02 342.70
0.6890 353.08 351.00
0.7120 353.02 356.40
0.7370 353.03 362.00
0.7970 353.02 373.60
0.8200 353.00 377.90
0.8520 353.03 385.00
0.9550 353.06 405.00
0.9650 353.03 407.80
0.1690 363.01 308.70
0.2430 363.00 329.00
0.3100 363.00 349.10
0.4180 363.02 376.90
0.4570 363.01 388.00
0.6020 363.02 425.50
0.6420 363.00 435.90
0.7170 363.00 456.30
0.7590 363.00 467.40
0.7950 363.01 477.10
0.8350 363.00 488.00
0.9320 362.99 510.30

Sources