Mixture of Silicon tetrachloride + Dichlorosilane

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Silicon tetrachloride

Name
Silicon tetrachloride
InChI
InChI=1S/Cl4Si/c1-5(2,3)4
InChI Key
FDNAPBUWERUEDA-UHFFFAOYSA-N
Formula
Cl4Si
SMILES
Cl[Si](Cl)(Cl)Cl
Mol. Weight (g/mol)
169.90
CAS
10026-04-7

Dichlorosilane

Name
Dichlorosilane
InChI
InChI=1S/Cl2H2Si/c1-3-2/h3H2
InChI Key
MROCJMGDEKINLD-UHFFFAOYSA-N
Formula
Cl2H2Si
SMILES
Cl[SiH2]Cl
Mol. Weight (g/mol)
101.01
CAS
4109-96-0
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Datasets

  1. Mole fraction (2)
  2. Pvap - Vapor or sublimation pressure, kPa (2)

Mole fraction of Dichlorosilane (2) [ref]

Fixed Measured
Mole fraction of Dichlorosilane (2) - Liquid Temperature, K - Liquid Mole fraction of Dichlorosilane (2) - Gas
0.0920 343.29 0.3080
0.2670 343.28 0.5940
0.3630 343.29 0.6900
0.4470 343.30 0.7530
0.6620 343.28 0.8740
0.7170 343.27 0.8970
0.8960 343.26 0.9620
0.9190 343.28 0.9670
0.0800 353.06 0.2590
0.1320 353.07 0.3830
0.1530 353.06 0.4180
0.2340 353.07 0.5500
0.3230 353.08 0.6510
0.4320 353.10 0.7410
0.6210 353.07 0.8440
0.6590 353.05 0.8630
0.7500 353.07 0.8980
0.8320 353.06 0.9310

Mole fraction of Dichlorosilane (2) [ref]

Fixed Measured
Mole fraction of Dichlorosilane (2) - Liquid Temperature, K - Liquid Mole fraction of Dichlorosilane (2) - Gas
0.0920 343.29 0.3080
0.2670 343.28 0.5940
0.3630 343.29 0.6900
0.4470 343.30 0.7530
0.6620 343.28 0.8740
0.7170 343.27 0.8970
0.8960 343.26 0.9620
0.9190 343.28 0.9670
0.0800 353.06 0.2590
0.1320 353.07 0.3830
0.1530 353.06 0.4180
0.2340 353.07 0.5500
0.3230 353.08 0.6510
0.4320 353.10 0.7410
0.6210 353.07 0.8440
0.6590 353.05 0.8630
0.7500 353.07 0.8980
0.8320 353.06 0.9310

Vapor or sublimation pressure, kPa [ref]

Fixed Measured
Mole fraction of Dichlorosilane (2) - Liquid Temperature, K - Liquid Vapor or sublimation pressure, kPa - Liquid
0.0920 343.29 205.10
0.2670 343.28 300.30
0.3630 343.29 348.50
0.4470 343.30 390.00
0.6620 343.28 492.90
0.7170 343.27 517.50
0.8960 343.26 595.00
0.9190 343.28 602.00
0.0800 353.06 254.00
0.1320 353.07 290.10
0.1530 353.06 305.00
0.2340 353.07 360.10
0.3230 353.08 418.00
0.4320 353.10 484.90
0.6210 353.07 595.60
0.6590 353.05 616.10
0.7500 353.07 664.00
0.8320 353.06 705.70

Vapor or sublimation pressure, kPa [ref]

Fixed Measured
Mole fraction of Dichlorosilane (2) - Liquid Temperature, K - Liquid Vapor or sublimation pressure, kPa - Liquid
0.0920 343.29 205.10
0.2670 343.28 300.30
0.3630 343.29 348.50
0.4470 343.30 390.00
0.6620 343.28 492.90
0.7170 343.27 517.50
0.8960 343.26 595.00
0.9190 343.28 602.00
0.0800 353.06 254.00
0.1320 353.07 290.10
0.1530 353.06 305.00
0.2340 353.07 360.10
0.3230 353.08 418.00
0.4320 353.10 484.90
0.6210 353.07 595.60
0.6590 353.05 616.10
0.7500 353.07 664.00
0.8320 353.06 705.70

Sources