Mixture of Dichlorosilane + Silane, trichloro
Datasets
-
Mole fraction (2)
-
Pvap - Vapor or sublimation pressure, kPa (2)
Mole fraction of Dichlorosilane (1)
[ref]
Fixed |
Measured |
Mole fraction of Dichlorosilane (1) - Liquid |
Temperature, K - Liquid |
Mole fraction of Dichlorosilane (1) - Gas |
0.0310 |
343.03 |
0.0570 |
0.0750 |
343.00 |
0.1350 |
0.0980 |
343.04 |
0.1710 |
0.1410 |
343.01 |
0.2390 |
0.1620 |
343.02 |
0.2650 |
0.2490 |
343.02 |
0.3870 |
0.3410 |
343.03 |
0.4880 |
0.4380 |
343.03 |
0.5940 |
0.5050 |
343.02 |
0.6480 |
0.6450 |
343.04 |
0.7640 |
0.7510 |
343.03 |
0.8460 |
0.7760 |
343.05 |
0.8570 |
0.0640 |
333.13 |
0.1180 |
0.0910 |
333.11 |
0.1680 |
0.1370 |
333.10 |
0.2400 |
0.2200 |
333.12 |
0.3580 |
0.2570 |
333.11 |
0.4030 |
0.3610 |
333.11 |
0.5230 |
0.4020 |
333.12 |
0.5620 |
0.5640 |
333.10 |
0.7120 |
0.6890 |
333.13 |
0.8020 |
0.7140 |
333.09 |
0.8230 |
0.7750 |
333.11 |
0.8660 |
0.7990 |
333.10 |
0.8810 |
0.8300 |
333.08 |
0.9000 |
0.8470 |
333.10 |
0.9100 |
0.8560 |
333.11 |
0.9160 |
0.0570 |
323.13 |
0.1150 |
0.1070 |
323.17 |
0.1980 |
0.1510 |
323.16 |
0.2640 |
0.2110 |
323.16 |
0.3540 |
0.2530 |
323.16 |
0.4030 |
0.3080 |
323.16 |
0.4690 |
0.3600 |
323.15 |
0.5340 |
0.5680 |
323.18 |
0.7220 |
0.6020 |
323.23 |
0.7430 |
0.6740 |
323.18 |
0.8020 |
0.7280 |
323.20 |
0.8340 |
0.7430 |
323.19 |
0.8480 |
0.7680 |
323.19 |
0.8590 |
Mole fraction of Dichlorosilane (1)
[ref]
Fixed |
Measured |
Mole fraction of Dichlorosilane (1) - Liquid |
Temperature, K - Liquid |
Mole fraction of Dichlorosilane (1) - Gas |
0.0310 |
343.03 |
0.0570 |
0.0750 |
343.00 |
0.1350 |
0.0980 |
343.04 |
0.1710 |
0.1410 |
343.01 |
0.2390 |
0.1620 |
343.02 |
0.2650 |
0.2490 |
343.02 |
0.3870 |
0.3410 |
343.03 |
0.4880 |
0.4380 |
343.03 |
0.5940 |
0.5050 |
343.02 |
0.6480 |
0.6450 |
343.04 |
0.7640 |
0.7510 |
343.03 |
0.8460 |
0.7760 |
343.05 |
0.8570 |
0.0640 |
333.13 |
0.1180 |
0.0910 |
333.11 |
0.1680 |
0.1370 |
333.10 |
0.2400 |
0.2200 |
333.12 |
0.3580 |
0.2570 |
333.11 |
0.4030 |
0.3610 |
333.11 |
0.5230 |
0.4020 |
333.12 |
0.5620 |
0.5640 |
333.10 |
0.7120 |
0.6890 |
333.13 |
0.8020 |
0.7140 |
333.09 |
0.8230 |
0.7750 |
333.11 |
0.8660 |
0.7990 |
333.10 |
0.8810 |
0.8300 |
333.08 |
0.9000 |
0.8470 |
333.10 |
0.9100 |
0.8560 |
333.11 |
0.9160 |
0.0570 |
323.13 |
0.1150 |
0.1070 |
323.17 |
0.1980 |
0.1510 |
323.16 |
0.2640 |
0.2110 |
323.16 |
0.3540 |
0.2530 |
323.16 |
0.4030 |
0.3080 |
323.16 |
0.4690 |
0.3600 |
323.15 |
0.5340 |
0.5680 |
323.18 |
0.7220 |
0.6020 |
323.23 |
0.7430 |
0.6740 |
323.18 |
0.8020 |
0.7280 |
323.20 |
0.8340 |
0.7430 |
323.19 |
0.8480 |
0.7680 |
323.19 |
0.8590 |
Vapor or sublimation pressure, kPa
[ref]
Fixed |
Measured |
Mole fraction of Dichlorosilane (1) - Liquid |
Temperature, K - Liquid |
Vapor or sublimation pressure, kPa - Liquid |
0.0310 |
343.03 |
332.10 |
0.0750 |
343.00 |
346.20 |
0.0980 |
343.04 |
354.60 |
0.1410 |
343.01 |
369.00 |
0.1620 |
343.02 |
376.00 |
0.2490 |
343.02 |
406.10 |
0.3410 |
343.03 |
435.00 |
0.4380 |
343.03 |
466.90 |
0.5050 |
343.02 |
488.00 |
0.6450 |
343.04 |
532.00 |
0.7510 |
343.03 |
564.00 |
0.7760 |
343.05 |
570.00 |
0.0640 |
333.13 |
262.40 |
0.0910 |
333.11 |
269.60 |
0.1370 |
333.10 |
282.50 |
0.2200 |
333.12 |
305.10 |
0.2570 |
333.11 |
314.00 |
0.3610 |
333.11 |
342.00 |
0.4020 |
333.12 |
352.70 |
0.5640 |
333.10 |
394.00 |
0.6890 |
333.13 |
424.50 |
0.7140 |
333.09 |
431.00 |
0.7750 |
333.11 |
446.50 |
0.7990 |
333.10 |
452.00 |
0.8300 |
333.08 |
459.00 |
0.8470 |
333.10 |
462.00 |
0.8560 |
333.11 |
464.00 |
0.0570 |
323.13 |
195.40 |
0.1070 |
323.17 |
205.60 |
0.1510 |
323.16 |
215.60 |
0.2110 |
323.16 |
228.40 |
0.2530 |
323.16 |
237.00 |
0.3080 |
323.16 |
248.20 |
0.3600 |
323.15 |
259.00 |
0.5680 |
323.18 |
301.00 |
0.6020 |
323.23 |
308.00 |
0.6740 |
323.18 |
322.00 |
0.7280 |
323.20 |
332.00 |
0.7430 |
323.19 |
336.00 |
0.7680 |
323.19 |
340.00 |
Vapor or sublimation pressure, kPa
[ref]
Fixed |
Measured |
Mole fraction of Dichlorosilane (1) - Liquid |
Temperature, K - Liquid |
Vapor or sublimation pressure, kPa - Liquid |
0.0310 |
343.03 |
332.10 |
0.0750 |
343.00 |
346.20 |
0.0980 |
343.04 |
354.60 |
0.1410 |
343.01 |
369.00 |
0.1620 |
343.02 |
376.00 |
0.2490 |
343.02 |
406.10 |
0.3410 |
343.03 |
435.00 |
0.4380 |
343.03 |
466.90 |
0.5050 |
343.02 |
488.00 |
0.6450 |
343.04 |
532.00 |
0.7510 |
343.03 |
564.00 |
0.7760 |
343.05 |
570.00 |
0.0640 |
333.13 |
262.40 |
0.0910 |
333.11 |
269.60 |
0.1370 |
333.10 |
282.50 |
0.2200 |
333.12 |
305.10 |
0.2570 |
333.11 |
314.00 |
0.3610 |
333.11 |
342.00 |
0.4020 |
333.12 |
352.70 |
0.5640 |
333.10 |
394.00 |
0.6890 |
333.13 |
424.50 |
0.7140 |
333.09 |
431.00 |
0.7750 |
333.11 |
446.50 |
0.7990 |
333.10 |
452.00 |
0.8300 |
333.08 |
459.00 |
0.8470 |
333.10 |
462.00 |
0.8560 |
333.11 |
464.00 |
0.0570 |
323.13 |
195.40 |
0.1070 |
323.17 |
205.60 |
0.1510 |
323.16 |
215.60 |
0.2110 |
323.16 |
228.40 |
0.2530 |
323.16 |
237.00 |
0.3080 |
323.16 |
248.20 |
0.3600 |
323.15 |
259.00 |
0.5680 |
323.18 |
301.00 |
0.6020 |
323.23 |
308.00 |
0.6740 |
323.18 |
322.00 |
0.7280 |
323.20 |
332.00 |
0.7430 |
323.19 |
336.00 |
0.7680 |
323.19 |
340.00 |
Sources